diff --git a/build-common/src/org/jetbrains/kotlin/incremental/buildUtil.kt b/build-common/src/org/jetbrains/kotlin/incremental/buildUtil.kt
index 74e2cd840a3..745453842f6 100644
--- a/build-common/src/org/jetbrains/kotlin/incremental/buildUtil.kt
+++ b/build-common/src/org/jetbrains/kotlin/incremental/buildUtil.kt
@@ -32,6 +32,7 @@ import org.jetbrains.kotlin.progress.CompilationCanceledStatus
 import org.jetbrains.kotlin.resolve.sam.SAM_LOOKUP_NAME
 import org.jetbrains.kotlin.utils.addToStdlib.flattenTo
 import java.io.File
+import java.nio.file.Files
 import java.util.*
 import kotlin.collections.HashSet
 import kotlin.collections.LinkedHashSet
@@ -67,7 +68,7 @@ fun makeModuleFile(
         friendDirs
     )
 
-    val scriptFile = File.createTempFile("kjps", sanitizeJavaIdentifier(name) + ".script.xml")
+    val scriptFile = Files.createTempFile("kjps", sanitizeJavaIdentifier(name) + ".script.xml").toFile()
     scriptFile.writeText(builder.asText().toString())
     return scriptFile
 }
diff --git a/jps-plugin/src/org/jetbrains/kotlin/jps/targets/KotlinJvmModuleBuildTarget.kt b/jps-plugin/src/org/jetbrains/kotlin/jps/targets/KotlinJvmModuleBuildTarget.kt
index f8faf7a0149..2464d4f46f3 100644
--- a/jps-plugin/src/org/jetbrains/kotlin/jps/targets/KotlinJvmModuleBuildTarget.kt
+++ b/jps-plugin/src/org/jetbrains/kotlin/jps/targets/KotlinJvmModuleBuildTarget.kt
@@ -46,6 +46,9 @@ import org.jetbrains.kotlin.utils.keysToMap
 import org.jetbrains.org.objectweb.asm.ClassReader
 import java.io.File
 import java.io.IOException
+import java.nio.file.Files
+import java.nio.file.Path
+import java.nio.file.Paths
 
 private const val JVM_BUILD_META_INFO_FILE_NAME = "jvm-build-meta-info.txt"
 
@@ -242,14 +245,18 @@ class KotlinJvmModuleBuildTarget(kotlinContext: KotlinCompileContext, jpsModuleB
                 append("-test")
             }
         }
-        val dir = System.getProperty("kotlin.jps.dir.for.module.files")?.let { File(it) }?.takeIf { it.isDirectory }
+
+        fun createTempFile(dir: Path?, prefix: String?, suffix: String?): Path =
+            if (dir != null) Files.createTempFile(dir, prefix, suffix) else Files.createTempFile(prefix, suffix)
+
+        val dir = System.getProperty("kotlin.jps.dir.for.module.files")?.let { Paths.get(it) }?.takeIf { Files.isDirectory(it) }
         return try {
-            File.createTempFile("kjps", readableSuffix + ".script.xml", dir)
+            createTempFile(dir, "kjps", readableSuffix + ".script.xml")
         } catch (e: IOException) {
             // sometimes files cannot be created, because file name is too long (Windows, Mac OS)
             // see https://bugs.openjdk.java.net/browse/JDK-8148023
             try {
-                File.createTempFile("kjps", ".script.xml", dir)
+                createTempFile(dir, "kjps", ".script.xml")
             } catch (e: IOException) {
                 val message = buildString {
                     append("Could not create module file when building chunk $chunk")
@@ -259,7 +266,7 @@ class KotlinJvmModuleBuildTarget(kotlinContext: KotlinCompileContext, jpsModuleB
                 }
                 throw RuntimeException(message, e)
             }
-        }
+        }.toFile()
     }
 
     private fun findClassPathRoots(): Collection<File> {
diff --git a/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/compilerRunner/reportUtils.kt b/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/compilerRunner/reportUtils.kt
index 943a557fed7..0a5ea37eeae 100644
--- a/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/compilerRunner/reportUtils.kt
+++ b/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/compilerRunner/reportUtils.kt
@@ -31,6 +31,7 @@ import org.jetbrains.org.objectweb.asm.ClassVisitor
 import org.jetbrains.org.objectweb.asm.FieldVisitor
 import org.jetbrains.org.objectweb.asm.Opcodes
 import java.io.File
+import java.nio.file.Files
 import java.time.LocalDateTime
 import java.time.format.DateTimeFormatter
 import java.util.zip.ZipFile
@@ -126,7 +127,7 @@ internal fun runToolInSeparateProcess(
 
 private fun writeArgumentsToFile(directory: File, argsArray: Array<String>): File {
     val compilerOptions =
-        File.createTempFile(LocalDateTime.now().format(DateTimeFormatter.BASIC_ISO_DATE) + "_", ".compiler.options", directory)
+        Files.createTempFile(directory.toPath(), LocalDateTime.now().format(DateTimeFormatter.BASIC_ISO_DATE) + "_", ".compiler.options").toFile()
     compilerOptions.deleteOnExit()
     compilerOptions.writeText(argsArray.joinToString(" ") { "\"${StringEscapeUtils.escapeJava(it)}\"" })
     return compilerOptions
diff --git a/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/gradle/utils/fileUtils.kt b/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/gradle/utils/fileUtils.kt
index 06bb7469272..4353ac6ef62 100644
--- a/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/gradle/utils/fileUtils.kt
+++ b/libraries/tools/kotlin-gradle-plugin/src/main/kotlin/org/jetbrains/kotlin/gradle/utils/fileUtils.kt
@@ -7,6 +7,7 @@ package org.jetbrains.kotlin.gradle.utils
 
 import org.gradle.api.Project
 import java.io.File
+import java.nio.file.Files
 import java.nio.file.Paths
 import java.util.*
 
@@ -28,10 +29,10 @@ internal fun File.relativeToRoot(project: Project): String =
 internal fun Iterable<File>.toSortedPathsArray(): Array<String> =
     map { it.canonicalPath }.toTypedArray().also { Arrays.sort(it) }
 
-internal fun newTmpFile(prefix: String, suffix: String? = null, directory: File? = null, deleteOnExit: Boolean = true) =
-    File.createTempFile(prefix, suffix, directory).apply {
-        if (deleteOnExit) deleteOnExit()
-    }
+internal fun newTmpFile(prefix: String, suffix: String? = null, directory: File? = null, deleteOnExit: Boolean = true): File =
+    (if (directory == null) Files.createTempFile(prefix, suffix) else Files.createTempFile(directory.toPath(), prefix, suffix))
+        .toFile()
+        .apply { if (deleteOnExit) deleteOnExit() }
 
 internal fun File.isParentOf(childCandidate: File, strict: Boolean = false): Boolean {
     val parentPath = Paths.get(this.absolutePath).normalize()
diff --git a/libraries/tools/kotlin-maven-plugin/src/main/java/org/jetbrains/kotlin/maven/ExecuteKotlinScriptMojo.java b/libraries/tools/kotlin-maven-plugin/src/main/java/org/jetbrains/kotlin/maven/ExecuteKotlinScriptMojo.java
index 9050707c2aa..e85cb4f6c0a 100644
--- a/libraries/tools/kotlin-maven-plugin/src/main/java/org/jetbrains/kotlin/maven/ExecuteKotlinScriptMojo.java
+++ b/libraries/tools/kotlin-maven-plugin/src/main/java/org/jetbrains/kotlin/maven/ExecuteKotlinScriptMojo.java
@@ -53,9 +53,10 @@ import org.jetbrains.kotlin.scripting.compiler.plugin.ConfigurationKt;
 import org.jetbrains.kotlin.scripting.compiler.plugin.ScriptingCompilerConfigurationComponentRegistrar;
 import org.jetbrains.kotlin.utils.ParametersMapKt;
 
-import java.io.File;
-import java.io.FileOutputStream;
-import java.io.IOException;
+import java.io.*;
+import java.nio.charset.StandardCharsets;
+import java.nio.file.Files;
+import java.nio.file.Path;
 import java.util.ArrayList;
 import java.util.List;
 import java.util.stream.Collectors;
@@ -138,17 +139,17 @@ public class ExecuteKotlinScriptMojo extends AbstractMojo {
                 buildDirectory.mkdirs();
             }
 
-            File scriptFile = File.createTempFile("kotlin-maven-plugin-inline-script-", ".tmp.kts", buildDirectory);
-            FileOutputStream stream = new FileOutputStream(scriptFile);
-            stream.write(script.getBytes("UTF-8"));
-            stream.close();
+            Path scriptFile = Files.createTempFile(buildDirectory.toPath(), "kotlin-maven-plugin-inline-script-", ".tmp.kts");
+            try (BufferedWriter writer = Files.newBufferedWriter(scriptFile, StandardCharsets.UTF_8)) {
+                writer.write(script);
+            }
 
             try {
-                executeScriptFile(scriptFile);
+                executeScriptFile(scriptFile.toFile());
             } finally {
-                boolean deleted = scriptFile.delete();
+                boolean deleted = Files.deleteIfExists(scriptFile);
                 if (!deleted) {
-                    getLog().warn("Error deleting " + scriptFile.getAbsolutePath());
+                    getLog().warn("Error deleting " + scriptFile.toAbsolutePath());
                 }
             }
         } catch (IOException e) {