Deprecate escaped modifiers and unescaped annotations

compiler/testData/diagnostics/tests/annotations/kt1860-negative.kt

@@ -1,9 +1,9 @@
-fun foo(<!UNRESOLVED_REFERENCE!>varargs<!> <!UNUSED_PARAMETER!>f<!> : Int) {}
+fun foo(<!UNRESOLVED_REFERENCE, DEPRECATED_UNESCAPED_ANNOTATION!>varargs<!> <!UNUSED_PARAMETER!>f<!> : Int) {}
 
 var bar : Int = 1
   set(<!UNRESOLVED_REFERENCE!>varargs<!> v) {}
 
 val x : (Int) -> Int = {<!UNRESOLVED_REFERENCE!>@varargs<!> <!TYPE_MISMATCH!>x<!> <!DEPRECATED_STATIC_ASSERT!>: Int<!> <!SYNTAX!>-> x<!>}
 
-class Hello(<!UNRESOLVED_REFERENCE!>varargs<!> <!UNUSED_PARAMETER!>args<!>: Any) {
+class Hello(<!UNRESOLVED_REFERENCE, DEPRECATED_UNESCAPED_ANNOTATION!>varargs<!> <!UNUSED_PARAMETER!>args<!>: Any) {
 }